High-efficiency, high-reflectivity elliptical reflector light collection system
Automatic filter wheel system
Stable power supply
Light source instability < 1%
Monochromatic light module: Wavelength range of 300~1100 nm
Uniform coupling module: Uniformity area: ≤5×5 mm, uniformity > 99%
Collimation half-angle: < 3°
Optical Energy Calibration Module
Si light intensity detector
Wavelength range: 300-1100nm (extendable up to 2500nm)
Traceable to NIST with traceability report
Customized dark box
The dark box features noise shielding capability
The dark box does not include cables and adapters. They need to be purchased separately
For more detailed specifications, please consult with us.
Industrial computer (including monitor, keyboard, and mouse)
It adopts an exclusive patented Fourier optical component uniform illumination system, which can achieve uniform distribution of light intensity for monochromatic light.
In a 10mm x 10mm area, the non-uniformity of light intensity distribution can be less than 1% at 470nm, 530nm, 630nm, and 850nm. Similarly, in a 20mm x 20mm area, with a 10 x 10 matrix, the non-uniformity of light intensity distribution can be less than 4%.
Exclusive PDSW Software Development
Utilizing the advanced SW-XQE software platform, our system enables various automated inspections, including EQE, SR, I-V, NEP, D*, frequency noise-current graphs (A/Hz1/2), noise analysis, and more.
Absolute radiance calibration
Spectral response measurement
External Quantum Efficiency (EQE) measurement
Dark IV measurement, J0 analysis
NEP spectrum (Noise Equivalent Power spectrum)
Noise-current-frequency response graph
Shot noise analysis
I-V curve measurement
Measurement of I-V curves under different light intensities Measurement of voltage/current with fixed current/voltage, time-dependent voltage/current under illumination conditions.
Independent control and operation of the entire hardware system and data acquisition
The EQE testing function allows for testing at different single-color light wavelengths, and it can automatically test the full-spectrum EQE.
▌D* and NEP
Compared to other QE (Quantum Efficiency) systems, APD-QE can directly measure and obtain D* (Detectivity) and NEP (Noise Equivalent Power)
▌Frequency-Noise Current Curve
Upgraded FETOS software interface (optional) allows testing of both 3-terminal and 4-terminal Photo-FET components.
High-Precision Voltage Source/Current Source FFT Measurement Module
1E-12 Ampere Measurement Resolution
XYZ three-axis displacement platform
Customized probe station integration service 4″ Standard probe station (MPS-4-S)
Masked dark box
The APD-QE system, thanks to its excellent optical system design, can be combined with various prober.
All optical components of the full-wavelength spectrometer are integrated into a compact system. Monochromatic light is guided from the spectrometer to the probe station mask box.
The image shows the basic components of the MPS-4-S probe station, featuring a 4-inch vacuum chuck and 4 probe positioners with low-noise three-axis cables.
Integrated Prober Microscope with manual slider for switching to the desired position of the device under test.
After sliding the bar, the monochromator is “locked” in the desired position. The microscopic image can be displayed on the screen, enabling the user to make precise contact.
Customizable integration of multiple probe stations and mask boxes.
A. Customized isolation mask box.
B. Due to the advanced PD’s emphasis on fast response speed, the effective area needs to be small (to reduce capacitance effects). Therefore, there is often a need for integration with a prober.
C. It is possible to integrate different semiconductor analyzers such as the 4200 or E1500.