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APD-QE Advanced Optical Instrument for Quantum Efficiency of Light Sensors

  • APD-QE Advanced Optical Instrument for Quantum Efficiency MeasurementFeatures:
    • Irradiance Mode using a uniform light spot, in compliance with ASTM E1021, replaces traditional focused small spot for testing µm-level light detectors.
    • The use of a uniform light spot overcomes issues with chromatic aberration and distortion, enabling accurate measurement of EQE curves.
    • Compatible with various probe station systems, allowing for non-destructive and rapid testing.
    • Integration of optical and testing systems improves efficiency in system setup.
    • One-click automated testing software with automatic full spectrum calibration and verification, ensuring high work efficiency.
    • Testing capabilities include:
      • External Quantum Efficiency (EQE)
      • Spectral Responsivity (SR)
      • I-V curve analysis
      • NEP spectrum analysis
      • D* spectrum analysis
      • Noise-current-frequency response (A/Hz^(-1/2); 0.01Hz~1,000Hz)
      • Flicker noise, Johnson noise, Shot noise analysis


Photodetectors in LiDAR
InGaAs photodiode / SPAD
The optical sensor in the Apple Watch High-gain optoelectronic phototransistor for sensing and imaging
High-gain optoelectronic phototransistor for sensing and imaging High-sensitivity indirect conversion X-ray detector characterization Silicon photonics– InGaAs APD

Testable items

The advanced photodiodes/photodetectors used for detecting 4G/5G/optical communication/display panel applications have several relevant characteristics:

External Quantum Efficiency (EQE) spectrum measurement Spectral response measurement I-V曲線測量

  • 不同光強I-V曲線測量
  • 定電流/電壓,電壓/電流隨時間變化測試
D*光譜測量 Noise-current-frequency響應圖 (A/Hz-1/2; 0.01Hz~1,000Hz) Flicker noise, Johnson Noise, Shot noise 分析


Light source and beam delivery system High-stability Xenon lamp light source
High-efficiency, high-reflectivity elliptical reflector light collection system
Automatic filter wheel system
Stable power supply
Light source instability < 1%
Lamp timer
Monochromatic light module: Wavelength range of 300~1100 nm
Uniform coupling module: Uniformity area: ≤5×5 mm, uniformity > 99%
Collimation half-angle: < 3°
Optical Energy Calibration Module Si light intensity detector
Wavelength range: 300-1100nm (extendable up to 2500nm)
Traceable to NIST with traceability report
Customized dark box The dark box features noise shielding capability
The dark box does not include cables and adapters. They need to be purchased separately
For more detailed specifications, please consult with us.
Controller Industrial computer (including monitor, keyboard, and mouse)

Spot specifications

It adopts an exclusive patented Fourier optical component uniform illumination system, which can achieve uniform distribution of light intensity for monochromatic light.

In a 10mm x 10mm area, the non-uniformity of light intensity distribution can be less than 1% at 470nm, 530nm, 630nm, and 850nm. Similarly, in a 20mm x 20mm area, with a 10 x 10 matrix, the non-uniformity of light intensity distribution can be less than 4%.



Exclusive PDSW Software Development

Utilizing the advanced SW-XQE software platform, our system enables various automated inspections, including EQE, SR, I-V, NEP, D*, frequency noise-current graphs (A/Hz1/2), noise analysis, and more.

Absolute radiance calibration Spectral response measurement External Quantum Efficiency (EQE) measurement Dark IV measurement, J0 analysis NEP spectrum (Noise Equivalent Power spectrum)


Noise-current-frequency response graph
Flicker noise,
Johnson Noise,
Shot noise analysis
I-V curve measurement

Measurement of I-V curves under different light intensities Measurement of voltage/current with fixed current/voltage, time-dependent voltage/current under illumination conditions.

Independent control and operation of the entire hardware system and data acquisition

EQE Testing

The EQE testing function allows for testing at different single-color light wavelengths, and it can automatically test the full-spectrum EQE.

▌I-V Check
  The software supports multiple SMU (Source-Measure Unit) controls, allowing for automated light I-V testing and dark I-V testing. It also supports multiple graph displays.

軟體可支援多種 SMU 控制,自動進行照光 I-V 測試以及暗態 I-V 測試,並支援多圖顯示。

▌D* and NEP

Compared to other QE (Quantum Efficiency) systems, APD-QE can directly measure and obtain D* (Detectivity) and NEP (Noise Equivalent Power)

▌Frequency-Noise Current Curve


▌Upgradeable software

Upgraded FETOS software interface (optional) allows testing of both 3-terminal and 4-terminal Photo-FET components.


Optional Accessories

Item Optional Accessories
High-Precision Voltage Source/Current Source FFT Measurement Module 1E-12 Ampere Measurement Resolution
Sample stage XYZ three-axis displacement platform
Prober Customized probe station integration service 4″ Standard probe station (MPS-4-S)
Masked dark box Customizable

Integrated Prober

The APD-QE system, thanks to its excellent optical system design, can be combined with various prober.

All optical components of the full-wavelength spectrometer are integrated into a compact system. Monochromatic light is guided from the spectrometer to the probe station mask box.

The image shows the basic components of the MPS-4-S probe station, featuring a 4-inch vacuum chuck and 4 probe positioners with low-noise three-axis cables.

Integration of Uniform Illumination System and Prober


Integrated Prober Microscope with manual slider for switching to the desired position of the device under test.

After sliding the bar, the monochromator is “locked” in the desired position. The microscopic image can be displayed on the screen, enabling the user to make precise contact.

Customizable integration of multiple probe stations and mask boxes.


A. Customized isolation mask box.

B. Due to the advanced PD’s emphasis on fast response speed, the effective area needs to be small (to reduce capacitance effects). Therefore, there is often a need for integration with a prober.

C. It is possible to integrate different semiconductor analyzers such as the 4200 or E1500.

System Design