APD-QE Advanced Optical Instrument for Quantum Efficiency of Light Sensors

Application

Photodetectors in LiDAR InGaAs photodiode / SPAD	The optical sensor in the Apple Watch	High-gain optoelectronic phototransistor for sensing and imaging
High-gain optoelectronic phototransistor for sensing and imaging	High-sensitivity indirect conversion X-ray detector characterization	Silicon photonics– InGaAs APD

Testable items

The advanced photodiodes/photodetectors used for detecting 4G/5G/optical communication/display panel applications have several relevant characteristics:

External Quantum Efficiency (EQE) spectrum measurement

Spectral response measurement

I-V曲線測量

不同光強I-V曲線測量
定電流/電壓，電壓/電流隨時間變化測試

NEP光譜測量

D*光譜測量

Noise-current-frequency響應圖 (A/Hz^-1/2; 0.01Hz~1,000Hz)

Flicker noise, Johnson Noise, Shot noise 分析

Specification

Light source and beam delivery system	High-stability Xenon lamp light source
	High-efficiency, high-reflectivity elliptical reflector light collection system
	Automatic filter wheel system
	Stable power supply
	Light source instability < 1%
	Lamp timer
	Monochromatic light module: Wavelength range of 300~1100 nm
	Uniform coupling module: Uniformity area: ≤5×5 mm, uniformity > 99%
	Collimation half-angle: < 3°
Optical Energy Calibration Module	Si light intensity detector
	Wavelength range: 300-1100nm (extendable up to 2500nm)
	Traceable to NIST with traceability report
Customized dark box	The dark box features noise shielding capability
	The dark box does not include cables and adapters. They need to be purchased separately
	For more detailed specifications, please consult with us.
Controller	Industrial computer (including monitor, keyboard, and mouse)

Spot specifications

It adopts an exclusive patented Fourier optical component uniform illumination system, which can achieve uniform distribution of light intensity for monochromatic light.

In a 10mm x 10mm area, the non-uniformity of light intensity distribution can be less than 1% at 470nm, 530nm, 630nm, and 850nm. Similarly, in a 20mm x 20mm area, with a 10 x 10 matrix, the non-uniformity of light intensity distribution can be less than 4%.

Software

Exclusive PDSW Software Development

Utilizing the advanced SW-XQE software platform, our system enables various automated inspections, including EQE, SR, I-V, NEP, D*, frequency noise-current graphs (A/Hz1/2), noise analysis, and more.

Absolute radiance calibration

Spectral response measurement

External Quantum Efficiency (EQE) measurement

Dark IV measurement, J0 analysis

NEP spectrum (Noise Equivalent Power spectrum)

Spectrum

Noise-current-frequency response graph
(A/Hz-1/2)

Flicker noise,
Johnson Noise,
Shot noise analysis

I-V curve measurement

Measurement of I-V curves under different light intensities Measurement of voltage/current with fixed current/voltage, time-dependent voltage/current under illumination conditions.

Independent control and operation of the entire hardware system and data acquisition

EQE Testing

The EQE testing function allows for testing at different single-color light wavelengths, and it can automatically test the full-spectrum EQE.

▌I-V Check
　　The software supports multiple SMU (Source-Measure Unit) controls, allowing for automated light I-V testing and dark I-V testing. It also supports multiple graph displays.

▌D* and NEP

Compared to other QE (Quantum Efficiency) systems, APD-QE can directly measure and obtain D* (Detectivity) and NEP (Noise Equivalent Power)

▌Frequency-Noise Current Curve

▌Upgradeable software

Upgraded FETOS software interface (optional) allows testing of both 3-terminal and 4-terminal Photo-FET components.

Optional Accessories

Item	Optional Accessories
High-Precision Voltage Source/Current Source FFT Measurement Module	1E-12 Ampere Measurement Resolution
	1E-14安培量測解析度
	1E-16安培量測解析度
Sample stage	XYZ three-axis displacement platform
Prober	Customized probe station integration service 4″ Standard probe station (MPS-4-S)
Masked dark box	Customizable

Integrated Prober

The APD-QE system, thanks to its excellent optical system design, can be combined with various prober.

All optical components of the full-wavelength spectrometer are integrated into a compact system. Monochromatic light is guided from the spectrometer to the probe station mask box.

The image shows the basic components of the MPS-4-S probe station, featuring a 4-inch vacuum chuck and 4 probe positioners with low-noise three-axis cables.

均光系統與探針台整合 — Integration of Uniform Illumination System and Prober

Integrated Prober Microscope with manual slider for switching to the desired position of the device under test.

After sliding the bar, the monochromator is “locked” in the desired position. The microscopic image can be displayed on the screen, enabling the user to make precise contact.

Customizable integration of multiple probe stations and mask boxes.

A. Customized isolation mask box.

B. Due to the advanced PD’s emphasis on fast response speed, the effective area needs to be small (to reduce capacitance effects). Therefore, there is often a need for integration with a prober.

C. It is possible to integrate different semiconductor analyzers such as the 4200 or E1500.